Veröffentlichungen

Institut für Mikrointegration

Hier finden Sie alle Publikationen des IFM.

Publikationen am IFM

  1. Rühl, H., Günther, T., Zimmermann, A., & Holzer, C. (2023). Freie Oberflächenenergien von PVD-Hartstoffschichten bei Entformungstemperatur. In C. Bonten & M. Kreutzbruck (Hrsg.), Beiträge zum 28. Stuttgarter Kunststoffkolloquium (Bd. 28, S. 71–76). Institut für Kunststofftechnik, Universität Stuttgart.
  2. Schoenherr, M., Ruehl, H., Guenther, T., Zimmermann, A., & Gundelsweiler, B. (2023). Adhesion-Induced Demolding Forces of Hard Coated Microstructures Measured with a Novel Injection Molding Tool. Polymers, 15(5), 1285. https://doi.org/10.3390/polym15051285
  3. Walter, D., Bülau, A., & Zimmermann, A. (2023). Review on Excess Noise Measurements of Resistors. Sensors, 23(3), 1107. https://doi.org/10.3390/s23031107
  4. Horter, T., Ruehl, H., Yang, W., Chiang, Y.-S., Glaeser, K., & Zimmermann, A. (2023). Image Analysis Based Evaluation of Print Quality for Inkjet Printed Structures. Journal of Manufacturing and Materials Processing, 7(1), 1–15. https://doi.org/10.3390/jmmp7010020
  5. Ruehl, H., Guenther, T., & Zimmermann, A. (2023). Direct Processing of PVD Hard Coatings via Focused Ion Beam Milling for Microinjection Molding. Micromachines, 14(2), Article 2. https://doi.org/10.3390/mi14020294
  6. Kalozi, M. (2022). Charakterisierung der Oberflächenbeschaffenheit und Oberflächenenergie von Dünnschichten.
  7. Jäger, J., Schwenck, A., Walter, D., Bülau, A., Gläser, K., & Zimmermann, A. (2022). Inkjet-Printed Temperature Sensors Characterized according to Standards. Sensors, 22(21), 8145. https://doi.org/10.3390/s22218145
  8. Ruehl, H., Guenther, T., & Zimmermann, A. (2022). Injection compression molding of nanostructures from direct structured PVD hard coatings. Proceedings of the World Congress on Micro and Nano Manufacturing (WCMNM 2022), 63–66. https://www.4m-association.org/content/4M-conference-series/4m-conference-series.html
  9. Jeronimo, M. B., Straub, H., Hager, M., & Zimmermann, A. (2022). Material Property Variability of Composites in Thermo-Mechanical Studies Involving Virtual Design of Experiments. IEEE Transactions on Components, Packaging and Manufacturing Technology, 12(5), 778–788. https://doi.org/10.1109/TCPMT.2022.3163460
  10. Heringhaus, M. E., Buhmann, A., Müller, J., & Zimmermann, A. (2022). Graph neural networks for parameter estimation in micro-electro-mechanical system testing. Array, 14, 100162. https://doi.org/10.1016/j.array.2022.100162
  11. Jäger, J., Buschkamp, S., Werum, K., Gläser, K., Grözinger, T., Eberhardt, W., & Zimmermann, A. (2022). Contacting Inkjet-Printed Silver Structures and SMD by ICA and Solder. IEEE Transactions on Components, Packaging and Manufacturing Technology, 1–1. https://doi.org/10.1109/TCPMT.2022.3169558
  12. Petillon, S., Knöller, A., Bräuer, P., Helm, D., Grözinger, T., Weser, S., Eberhardt, W., Franke, J., & Zimmermann, A. (2022). Flexural Fatigue Test—A Proposed Method to Characterize the Lifetime of Conductor Tracks on Polymeric Substrates. Journal of Manufacturing and Materials Processing, 6(2), Article 2. https://doi.org/10.3390/jmmp6020041
  13. Guenther, T., Werum, K., Müller, E., Wolf, M., & Zimmermann, A. (2022). Characterization of Wire-Bonding on LDS Materials and HF-PCBs for High-Frequency Applications. Journal of Manufacturing and Materials Processing, 6(1), 9.
  14. Trotter, M., Juric, D., Bagherian, Z., Borst, N., Glaeser, K., von Stetten, F., & Zimmermann, A. (2021). Integration of nanoporous gold electrodes in microfluidic chambers by inkjet-printing for biosensing applications. MikroSystemTechnik Congress 2021, 476–478.
  15. Ruehl, H., Haub, M., Sahakalkan, S., Guenther, T., & Zimmermann, A. (2021). Focused ion beam writing of submicron structures into coated mold inserts. Proceedings of the 21st International Conference of the European Society for Precision Engineering and Nanotechnology, 137–140.
  16. Roeder, M., Guenther, T., Zimmermann, A., Giessen, H., Hentschel, M., & Thiele, S. (2021). Verfahren zum Herstellen eines Formwerkzeugs und Formwerkzeug zum Herstellen eines optischen Elements. https://patentscope.wipo.int/search/de/detail.jsf?docId=WO2021001242
  17. Roeder, M., Guenther, T., Zimmermann, A., Giessen, H., hentschel, M., & Thiele, S. (2021). Verfahren zum Herstellen eines Formwerkzeugs und Formwerkzeug zum Herstellen eines optischen Elements. https://patentscope.wipo.int/search/de/detail.jsf?docId=WO2021001242
  18. Haub, M., Bogner, M., Guenther, T., Zimmermann, A., & Sandmaier, H. (2021). Development and Proof of Concept of a Miniaturized MEMS Quantum Tunneling Accelerometer Based on PtC Tips by Focused Ion Beam 3D Nano-Patterning. Sensors, 21(11), Article 11. https://doi.org/10.3390/s21113795
  19. Schwenck, A., Grözinger, T., Guenther, T., Schumacher, A., Schuhmacher, D., Werum, K., & Zimmermann, A. (2021). Characterization of a PCB Based Pressure Sensor and Its Joining Methods for the Metal Membrane. Sensors, 21(16), Article 16. https://doi.org/10.3390/s21165557
  20. Schilling, A., Ninz, P., Petillon, S., Weser, S., Knöller, A., Eberhardt, W., Guenther, T., Kern, F., & Zimmermann, A. (2021). Erweiterung des Einsatzbereiches von laserstrukturierten 3D-MID durch die Verwendung von keramischen Substratmaterialien. MikroSystemTechnik Congress 2021.
  21. Guenther, T., Hausladen, F., Barth, M., Roeder, M., Janek, F., Drossart, D., Wurm, H., Sahakalkan, S., Stock, K., & Zimmermann, A. (2021). Development of a Micro-integrated hyperspectral imaging system. MikroSystemTechnik Congress 2021, 1–4.
  22. Guenther, T., Hausladen, F., Barth, M., Roeder, M., Janek, F., Drossart, D., Wurm, H., Sahakalkan, S., Stock, K., & Zimmermann, A. (2021). Development of a Micro-integrated hyperspectral imaging system. MikroSystemTechnik Congress 2021; Congress, 1–4.
  23. Haybat, M., Guenther, T., Kulkarni, R., Sahakalkan, S., Grözinger, T., Rothermel, T., Weser, S., & Zimmermann, A. (2021). Characterization of Hermetically Sealed Metallic Feedthroughs through Injection-Molded Epoxy-Molding Compounds. Applied Mechanics, 2(4), 976–996. https://doi.org/10.3390/applmech2040057
  24. Schwenk, A., Guenther, T., & Zimmermann, A. (2021). Characterization and Benchmark of a Novel Capacitive and Fluidic Inclination Sensor. Sensors, 21(23), 8030.
  25. Haub, M., Günther, T., Bogner, M., & Zimmermann, A. (2021). Investigation of Focused Ion and Electron Beam Platinum Carbon Nano-Tips with Transmission Electron Microscopy for Quantum Tunneling Vacuum Gap Applications. Applied Sciences, 11(24), 11793.
  26. Ristok, S., Roeder, M., Thiele, S., Hentschel, M., Guenther, T., Zimmermann, A., Herkommer, A. M., & Giessen, H. (2020). Mass-producible micro-optical elements by injection compression molding and focused ion beam structured titanium molding tools. Optics Letters, 45(5), 1184--1187. https://doi.org/10.1364/OL.385599
  27. Guenther, T., Schwenck, A., Matteucci, P., Leigh, R., Svehla, M., Zimmermann, A., & Suaning, G. J. (2020). Practical Aspects and Limitations of Hermeticity Testing of Microencapsulations Using Cumulative Helium Leak Detection for Miniaturized Implantable Medical Devices. IEEE Transactions on Components, Packaging and Manufacturing Technology, 10(3), 351–359. https://doi.org/10.1109/TCPMT.2020.2968126
  28. Kulkarni, R., Soltani, M., Wappler, P., Guenther, T., Fritz, K.-P., Groezinger, T., & Zimmermann, A. (2020). Reliability Study of Electronic Components on Board-Level Packages Encapsulated by Thermoset Injection Molding. Journal of Manufacturing and Materials Processing, 4(1), Article 1. https://doi.org/10.3390/jmmp4010026
  29. Guenther, T., Diegel, L., Roeder, M., Drexler, M., Haybat, M., Wappler, P., Soltani, M., & Zimmermann, A. (2020). Surface Optimization of Micro-Integrated Reflective Optical Elements by Thermoset Injection Molding. Applied Sciences, 10(12), Article 12. https://doi.org/10.3390/app10124197
  30. Civelek, F., Kulkarni, R., Fritz, K.-P., Meyer, T., Troulos, C., Guenther, T., & Zimmermann, A. (2020). Open-Eco-Innovation for SMEs with Pan-European Key Enabling Technology Centres. Clean Technologies, 2(4), 422--439. https://doi.org/10.3390/cleantechnol2040026
  31. Roeder, M., Schilling, P., Fritz, K.-P., Guenther, T., & Zimmermann, A. (2019). Challenges in the Fabrication of Microstructured Polymer Optics. Journal of Micro and Nano-Manufacturing, 7(2), Article 2. https://doi.org/10.1115/1.4044219
  32. Röder, M., Günther, T., & Zimmermann, A. (2019). Review on Fabrication Technologies for Optical Mold Inserts. Micromachines, 10(4), 233. https://doi.org/10.3390/mi10040233
  33. Roeder, M., Thiele, S., Hera, D., Pruss, C., Guenther, T., Osten, W., & Zimmermann, A. (2019). Fabrication of curved diffractive optical elements by means of laser direct writing, electroplating, and injection compression molding. Journal of Manufacturing Processes, 47, 402–409. https://doi.org/10.1016/j.jmapro.2019.10.012
  34. Kulkarni, R., Wappler, P., Soltani, M., Haybat, M., Guenther, T., Grözinger, T., & Zimmermann, A. (2019). An Assessment of Thermoset Injection Molding for Thin-Walled Conformal Encapsulation of Board-Level Electronic Packages. Journal of Manufacturing and Materials Processing, 3, 18. https://doi.org/10.3390/jmmp3010018
  35. Wolf, M., Janek, F., Meißner, T., Wigger, B., Barth, M., Guenther, T., Eberhardt, W., Geneiß, V., Lueke, T., Hedayat, C., & Otto, T. W. (2018, September). Investigation of Process Parameters on Permittivity for High-Frequency and Mixed-Signal Systems based on LDS Technology.
  36. Wolf, M., Janek, F., Meißner, T., Wigger, B., Barth, M., Guenther, T., Eberhardt, W., Geneiß, V., Luebke, T., Hedayat, C., & Otto, T. W. (2018, September). Investigation of Process Parameters on Permittivity for High-Frequency and Mixed-Signal Systems based on LDS Technology.
  37. Wolf, M., Janek, F., Meißner, T., Wigger, B., Barth, M., Günther, T., Eberhardt, W., Geneiß, V., Lueke, T., Hedayat, C., & Otto, T. W. (2018, September). Investigation of Process Parameters on Permittivity for High-Frequency and Mixed-Signal Systems based on LDS Technology.
  38. Röder, M., Drexler, M., Rothermel, T., Meißner, T., Günther, T., & Zimmermann, A. (2018). Injection Compression Molded Microlens Arrays for Hyperspectral Imaging. Micromachines, 9(7), 355. https://doi.org/10.3390/mi9070355
  39. Röder, M., Schilling, P., Fritz, K.-P., Günther, T., & Zimmermann, A. (2018). Challenges in the fabrication of microstructured polymer optics. World Congress on Micro and Nano Manufacturing, Portozoz.
  40. Röder, M., Schilling, P., Hera, D., Günther, T., & Zimmermann, A. (2018). Influences on the Fabrication of Diffractive Optical Elements by Injection Compression Molding. Journal of Manufacturing and Materials Processing, 2(1), 5. https://doi.org/10.3390/jmmp2010005
  41. Soltani, M., Freyburger, M., Kulkarni, R., Mohr, R., Grözinger, T., & Zimmermann, A. (2018). Development and Validation of a Novel Setup for LEDs Lifetime Estimation on Molded Interconnect Devices. Instruments, 2. https://doi.org/10.3390/instruments2040028
  42. Hera, D., Berndt, A., Guenther, T., Schmiel, S., Harendt, C., & Zimmermann, A. (2017). Flexible Packaging by Film-Assisted Molding for Microintegration of    Inertia Sensors. SENSORS, 17(7), Article 7. https://doi.org/10.3390/s17071511
  43. Kulkarni, R. A., Hera, D., Soltani, M., Günther, T., Grözinger, T., & Zimmermann, A. (2017). Feasibility of manufacturing packaged electronic systems by thermoset injection molding. Smart Systems Integration.
  44. Hera, D., Günther, T., & Zimmermann, A. (2017). Duroplaste – Hightech für die mikroelektronischen Packages von morgen. 25. Stuttgarter Kunststoffkolloquium, Stuttgart.
  45. Müller, H., Weser, S., Liu, Y., Vieten, T., Günther, T., Eberhardt, W., & Zimmermann, A. (2017). Additive Fertigung von Spritzgusswerkzeugeinsätzen für MID.
  46. Röder, M., Hera, D., Thiele, S., Pruss, C., Guenther, T., Osten, W., & Zimmermann, A. (2016). 3D laser direct-writing based master fabrication for injection compression molding of diffractive-refractive elements. European Optical Society Annual Meeting, Berlin.
  47. Müller, H., Weser, S., Liu, Y., Vieten, T., Günther, T., Eberhardt, W., & Zimmermann, A. (2016). Generative Processes for Rapid Prototyping of MID: Methods and Potentials. Proceedings of 12th International Congress Molded Interconnect Devices.
  48. Röder, M., Hera, D., Thiele, S., Pruss, C., günther, T., Osten, W., & Zimmermann, A. (2016). 3D laser direct-writing based master fabrication for injection compression molding of diffractive-refractive elements. European Optical Society Annual Meeting, Berlin.
  49. Müller, H., Weser, S., Liu, Y., vieten, T., Günther, T., Eberhardt, W., & Zimmermann, A. (2016). Generative Processes for Rapid Prototyping of MID: Methods and Potentials. Proceedings of 12th International Congress Molded Interconnect Devices.
  50. Müller, H., Weser, S., Liu, Y., Günther, T., Eberhardt, W., & Zimmermann, A. (2015). Rapid-Prototyping von MID mittels generativer Verfahren.
  51. Hera, D., Günther, T., Berndt, A., Harendt, C., Schulze Spüntrup, J. D., Reuter, C., Fritz, K.-P., Kück, H., & Zimmermann, A. (2015). Flexible packaging by film assisted molding for micro assembly technologies based on PCB. International Conference and Exhibition on Integration Issues of Miniaturized Smart Systems.
  52. Hera, D., Schulze Spüntrup, J. D., Günther, T., Harendt, C., Berndt, A., Reuter, C., Fritz, K.-P., Kück, H., & Zimmermann, A. (2015). Flexible packaging by film assisted molding for microintegration of MEMS based sensors. European Microelectronics and Packaging Conference & Exhibition, Fridrichshafen, Germany.
  53. Beichter, S., Weser, S., Müller, H., Petillon, S., Haug, B., Günther, T., Eberhardt, W., & Zimmermann, A. (2015). Functionalized Sensor Packaging Based on Thermoset Injection Molding and Selective Metallization Technology. 20th European Microelectronics and Packaging Conference & Exhibition, Friedrichshafen, Germany.
  54. Guenther, T., Kong, C. (Charlie), Lu, H., Svehla, M., Lovell, N., Ruys, A., & Suaning, G. J. (2014). Pt-Al2O3 interfaces in cofired ceramics for use in miniaturized neuroprosthetic implants. Journal of Biomedical Materials Research Part B Applied Biomaterials, 102(3), 500–507. https://doi.org/10.1002/jbm.b.33027
  55. Matic, V., Liedtke, L., Guenther, T., Buelau, A., Ilchmann, A., Keck, J., Polzinger, B., Eberhardt, W., & Kueck, H. (2014). Inkjet printed differential mode touch and humidity sensors on injection molded polymer packages. SENSORS, 2014 IEEE, 2234–2237. https://doi.org/10.1109/ICSENS.2014.6985485
  56. Polzinger, B., Matic, V., Liedtke, L., Keck, J., Hera, D., Günther, T., Eberhardt, W., & Kück, H. (2014). Printing of Functional Structures on Molded 3D Devices. 11th International Congress Molded Interconnect Devices – Scientific Proceedings, 1038, 37--42. https://doi.org/10.4028/www.scientific.net/AMR.1038.37
  57. Green, R. A., Guenther, T., Jeschke, C., Jaillon, A., Yu, J. F., Dueck, W. F., Lim, W. W., Henderson, W. C., Vanhoestenberghe, A., Lovell, N. H., & Suaning, G. J. (2013). Integrated electrode and high density feedthrough system for chip-scale implantable devices. Biomaterials, 34(26), 6109--6118. https://doi.org/10.1016/j.biomaterials.2013.04.054
  58. Patel, S., Guenther, T., Dodds, C. W. D., Kolke, S., Privat, K. L., Matteucci, P. B., & Suaning, G. J. (2013). Materials design considerations involved in the fabrication of implantable bionics by metallization of ceramic substrates. 2013 35th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC), 759–762. https://doi.org/10.1109/EMBC.2013.6609611
  59. Guenther, T., Lovell, N., & Suaning, G. J. (2012). Bionic vision: System architectures - A review. Expert Review of Medical Devices, 9(1), 33–48.
  60. Guenther, T., Mintri, A., Lim, W. W., Jung, L. H., Lehmann, T., Lovell, N. H., & Suaning, G. J. (2011). Laser-micromachined, chip-scaled ceramic carriers for implantable neurostimulators. 2011 Annual International Conference of the IEEE Engineering in Medicine and Biology Society, 1085–1088. https://doi.org/10.1109/IEMBS.2011.6090253
  61. Dodds, C. W. D., Schuettler, M., Guenther, T., Lovell, N. H., & Suaning, G. J. (2011). Advancements in electrode design and laser techniques for fabricating micro-electrode arrays as part of a retinal prosthesis. 2011 Annual International Conference of the IEEE Engineering in Medicine and Biology Society, 636–639. https://doi.org/10.1109/IEMBS.2011.6090141
  62. Guenther, T., Dodds, C. W. D., Lovell, N. H., & Suaning, G. J. (2011). Chip-scale hermetic feedthroughs for implantable bionics. 2011 Annual International Conference of the IEEE Engineering in Medicine and Biology Society, 6717–6720. https://doi.org/10.1109/IEMBS.2011.6091656
  63. Günther, T., Schüttler, M., Ordonez, J. S., Henle, C., Wilde, J., & Stieglitz, T. (2009). A Novel Interconnection Technology for Laser-Structured Platinum Silicone Electrode Arrays. 4th European Conference of the International Federation for Medical and Biological Engineering. https://doi.org/10.1007/978-3-540-89208-3_574
  64. Schuettler, M., Henle, C., Ordonez, J. S., Meier, W., Guenther, T., & Stieglitz, T. (2008). Interconnection technologies for laser-patterned electrode arrays. 2008 30th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, 3212–3215. https://doi.org/10.1109/IEMBS.2008.4649887
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